Effect of the Evaporation Temperature of a Tetraphenyl- Tetramethyl- Trisiloxane (Dow-Corning 704) Precursor on the Properties of Silicon Containing Diamond-Like Carbon (Si-DLC) Coatings Synthesized by Ion-Beam-Assisted Deposition (IBAD)

Report No. ARL-TR-1942
Authors: Fountzoulas, C. G.; Hirvonen, J. K.; Clayton, C. W.; Monserrat, M. E.; Halada, G. P.
Date/Pages: May 1999; 25 pages
Note: Prepared in collaboration with State University of New York at Stony Brook, Stony Brook, NY.
Abstract: Hard, adherent, and low-friction amorphous Si containing diamond-like carbon (Si-DLC) coatings has been synthesized both by 40-keV and 2.5-keV Ar ion- beam-assisted deposition (IBAD) of a tetraphenyl-tetramethyl-trisiloxane (C6H5) 4(CH3)4Si3O2 oil onto Si wafer substrates. The sp sup 3 and sp sup 2 bonding ratio of the coatings was investigated with the aid of Fourier-transform infrared (FTIR) microspectroscopy and valence band x-ray photoelectron spectroscopy (XPS). In addition, the effect of the oil evaporation rate on film morphology is also discussed.
Distribution: Approved for public release
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Last Update / Reviewed: May 1, 1999