Design of the Transmission Electron Microscope (TEM) Sample Scriber Template as Developed to Improve and Simplify the Sample Preparation Procedure

Report No. ARL-TR-4299
Authors: Wendy L. Sarney
Date/Pages: October 2007; 28 pages
Abstract: The image quality and visibility of the crystal planes in a TEM sample directly relate to how we initially cleave the wafer during the sample preparation process. For diffraction-contrast imaging, many defects and other crystalline features are orientation specific, and are only visible along certain zone axes. The resolution limits of the TEM dictate the preferred zone axes for phase-contrast imaging. The TEM Sample Scribing Template described here allows easy selection of the zone axes by cleaving the wafer along specific crystal directions.
Distribution: Approved for public release
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Last Update / Reviewed: October 1, 2007