Reducing Film Thickness in Lead Zirconate Titanate Thin Film Capacitors

Report No. ARL-TR-4338
Authors: Vikram Rao and Ronald G. Polcawich
Date/Pages: December 2007; 24 pages
Abstract: The goal of this project is to characterize the dielectric and ferroelectric performance of lead zirconate titanate (PZT) thin film capacitors as a function of film thickness and sol-gel solution composition. For the thickness experiments, the underlying silicon dioxide, platinum electrode, and the spin-deposited PZT thicknesses were varied. For the solution tests, the molarity and the zirconium/titanium ratio was also varied. In addition, PZT spin rate was varied to determine the spin rates effect on PZT thickness and dielectric and ferroelectric properties. Both capacitance and hysteresis data were taken for all samples. This project will aid the Defense Advanced Research Projects Agency (DARPA) nanoelectromechanical switch (NEMS) program by investigating avenues of reducing film thickness while maintaining acceptable levels of performance.
Distribution: Approved for public release
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Last Update / Reviewed: December 1, 2007