Patterning of Thick Parylene Films by Oxygen Plasma for Application as Exploding Foil Initiator Flyer Material

Report No. ARL-TR-4956
Authors: Eugene Zakar and Michael D. Grapes
Date/Pages: September 2009; 24 pages
Abstract: Parylene is an attractive flyer material for the exploding foil initiator due to its superior conformal step coverage and inert properties. A process for patterning thick films of Parylene using a thin metal masking layer and oxygen plasma has been developed. Gold and titanium have been compared as masking materials on the basis of masking quality and compatibility with existing processes. Etch rate, directionality, and minimum feature size have been approximated for isotropic and anisotropic oxygen plasma etch recipes. Remaining obstacles to process integration are discussed.
Distribution: Approved for public release
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Last Update / Reviewed: September 1, 2009