Black Silicon Germanium (SiGe) for Extended Wavelength Near Infrared Electro-optical Applications

Report No. ARL-TR-5202
Authors: Fred Semendy, Patrick Taylor, Gregory Meissner, and Priyalal Wijewarnasuriya
Date/Pages: May 2010; 22 pages
Abstract: We have investigated for the first time the reflectivity and absorbance of black silicon-germanium (Si1-xGex). Black Si1-xGex was produced by metal enhanced chemical etching using nanometer-scale gold particles as catalyst and HF:H2O2:CH3COOH etchant. The etched surface was black, textured, and showed strong suppression of reflectivity and enhancement of absorption in the near-infrared region. These properties are consistent with Si1-xGex becoming highly micro-structured due to metal catalysis and wet etching. The lowering of reflection and enhancement of absorption in Si1-xGex is an important milestone towards practical, extended wavelength (~2 µm) electro-optical applications.
Distribution: Approved for public release
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Last Update / Reviewed: May 1, 2010