Random Surface Texturing of Silicon Dioxide Using Gold Agglomerates

Report No. ARL-TR-7722
Authors: Kimberley A Olver
Date/Pages: July 2016; 16 pages
Abstract: A fabrication process for creating a silicon dioxide (SiO2) light-trapping structure as part of an anti-reflective (AR) coating has been developed. A thin e-beam-deposited gold layer, when deposited onto an oxide surface, will coalesce into an even distribution of irregular agglomerates, also known as "complete islanding". By using these gold agglomerations as a metal mask, the SiO2 can be etched using an inductively coupled plasma system. The result is a textured surface structure, which can then be used as a light-trapping top layer in an AR coating on solar cells.
Distribution: Approved for public release
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Last Update / Reviewed: July 1, 2016