Understanding Transmission Electron Microscopy Diffraction Patterns Obtained From Infrared Semiconductor Materials

Report No. ARL-TR-3128
Authors: Wendy L. Sarney
Date/Pages: December 2003; 23 pages
Abstract: Materials analysis is enhanced by transmission electron microscopy (TEM) images and their corresponding diffraction pattern data. While TEM images are widely reported and largely understood, the diffraction pattern data tends to be underused or completely neglected. Diffraction patterns complement TEM images by allowing accurate structural assessments, including lattice plane identification and defect characterization. This paper explains how to read diffraction patterns by understanding how they relate to the crystal in real space. For ease of illustration we use examples from semiconductor materials grown for infrared detector research at ARL.
Distribution: Approved for public release
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Last Update / Reviewed: December 1, 2003