Procedure for Substrate Temperature Control Using the Pyrometer During MBE Growth.

Report No. ARL-MR-491
Authors: Stefan Svensson.
Date/Pages: October 2000; 28 pages
Abstract: Command procedures have been developed for the Army Research Laboratory molecular beam epitaxy (MBE) computer control system that allow a user to automatically outgas and desorb the oxide from substrates before growth, as well as set substrate temperatures based on pyrometer readings during growths. These procedures allow completely unattended growth of structures once suitable temperatures have been determined.
Distribution: Approved for public release
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Last Update / Reviewed: October 1, 2000