Processing Method for Creating Ultra-Thin Lead Zirconate Titanate (PZT) Films Via Chemical Solution Deposition

Report No. ARL-TN-0338
Authors: Richard Piekarz and Ronald G. Polcawich
Date/Pages: December 2008; 18 pages
Abstract: This report summarizes the effort to use modifications to a lead zirconate titanate (PZT) chemical solution process to create high performance ferroelectric, dielectric, and piezoelectric thin films with reduced film thicknesses.
Distribution: Approved for public release
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Last Update / Reviewed: December 1, 2008