Optimization of PbTiO3 Seed Layers for PZT MEMS Actuators

Report No. ARL-TR-4697
Authors: Luz Sanchez and Ronald G. Polcawich
Date/Pages: December 2008; 30 pages
Abstract: The material properties of sol-gel lead zirconate titanate (PZT) are inherently linked with its crystallinity and texture. The use of seed layers and control of the base metal crystal structure ultimately controls the ferroelectric and piezoelectric properties of the thin film. This effort attempted to transfer the PbTiO3 seed layer fabrication process that has been recently accomplished at Pennsylvania State University under a fiscal year 2007 (FY07) Army Research Office - Short Term Innovative Research ARO-STIR) project to the U.S. Army Research Laboratory (ARL). Characterization included x-ray diffraction and ferroelectric, dielectric, and piezoelectric properties of the PZT thin films and PZT actuators fabricated using the ARL piezomicroelectromechanical systems (MEMS) switch fabrication process.
Distribution: Approved for public release
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Last Update / Reviewed: December 1, 2008