High-impedance Buffer Amplifier for MEMS Resonator Measurements

Report No. ARL-TN-0412
Authors: Brianna Murphy and Roger Kaul
Date/Pages: September 2010; 16 pages
Abstract: The electrical performance of micro-electromechanical system (MEMS) resonators built at the U.S. Army Research Laboratory (ARL) requires measurement techniques that do not overstress the devices. As a result, we need a high-impedance amplifier that operates over an extended frequency range suitable for use ahead of a 50-ohm vector network analyzer (VNA). The prototype amplifier buffers the resonator from the VNA. This amplifier was designed, fabricated, and tested during a fourweek period. It demonstrates that future designs using operational amplifiers with wider frequency ranges will be suitable for this application.
Distribution: Approved for public release
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Last Update / Reviewed: September 1, 2010