Modeling, Fabrication, and Testing of a Piezoelectric MEMS Vibrational Energy Reclamation Device

Report No. ARL-TR-3442
Authors: Jeffrey S. Pulskamp
Date/Pages: February 2005; 21 pages
Abstract: A piezoelectric vibrational energy reclamation device using sol-gel PZT/surface micromachining technology is described for the low power supply of microsystems; converting environmental vibration into useful electrical energy for powering microsystems. The design is appropriate for the power generation of low power remote MEMS sensor network nodes. Electro-mechanical modeling, fabrication, and testing of PZT MEMS are presented. Power generation of 1.54 mW/cm2 at 700 Hz/50 µm amplitude is predicted.
Distribution: Approved for public release
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Last Update / Reviewed: February 1, 2005