Process for Automated, Safe MBE Start and Flux Calibration

Report No. ARL-TR-2361
Authors: Stefan Svensson
Date/Pages: February 2001; 27 pages
Abstract: A command procedure has been developed for the U.S. Army Research Laboratory (ARL) molecular beam epitaxy (MBE) computer control system that allows a user to set up the system for an automated, unattended start each morning. The automated sequence consists of- 1. A system safety check to determine if cell ramping should be allowed. 2. A cell temperature ramp to an outgassing temperature. 3. An outgassing of cells. 4. A ramp-down of cells to nominal operating temperatures. 5. An automated setup through an iterative process of flux measurements and changes of temperatures until desired targets are reached. This command procedure allows a daily, safe start-up of the MBE system and generates identical flux settings that improve the crystal growth reproducibility. Typically, one can save two hours or more of a work day by using this automated procedure.
Distribution: Approved for public release
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Last Update / Reviewed: February 1, 2001