Microelectromechnical System Pressure Sensor for Projectile Applications

Report No. ARL-TR-3323
Authors: Eugene Zakar
Date/Pages: September 2004; 20 pages
Abstract: A miniaturized high pressure sensor for cannon-launched munitions was fabricated, based on microelectromechanical system MEMS) technology. It uses a 0.5-μm thin film of lead zirconate titanate (PZT) material for producing an electrical charge that is directly proportional to the pressure. The sensor was mounted on a customized stainless steel housing, placed into a highpressure vessel, and tested to a maximum pressure of 40,000 psi. The shape and configuration of the platinum (Pt)/PZT/Pt layered structure has been redesigned to reduce the complexity of wire interconnections and to increase the charge output of the device.
Distribution: Approved for public release
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Last Update / Reviewed: September 1, 2004