Microfabricated Cantilevers Based on Sputtered Thin-Film Ni50Ti50 Shape Memory Alloy (SMA)

Report No. ARL-TR-7381
Authors: Cory R Knick and Christopher J Morris
Date/Pages: August 2015; 20 pages
Abstract: In this work, we discuss the design and fabrication of a nickel-titanium (Ni50Ti50) shape memory alloy (SMA) cantilever array that was thermally actuated by harnessing the residual stress difference during the martensite-to-austenite phase transformation during heating. The cantilever devices were fabricated on a silicon (Si) wafer using standard microfabrication techniques and released using a xenon difluoride (XeF2) dry-etch technique and may therefore be applicable to microelectromechanical system (MEMS) switch or actuator applications. We demonstrated partially released devices capable of tearing a 13 µm rib of Si upon thermal actuation.
Distribution: Approved for public release
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Last Update / Reviewed: August 1, 2015