MicroElectroMechanical Systems (MEMS)

Foundational research includes piezoelectric and electrostatic sensor and actuators; pyrotechnic materials incorporated with MEMS sensors, actuators, and electronics; and agile manufacturing of micrometer and smaller scale features using additive techniques resulting in flexible electronics, three-dimensional MEMS, and heterogeneous materials integration.  Underlying competency in these areas will enable the Army to model, design, optimize, and prototype low-SWAP switches, resonators, varactors, filters, tunable passives, and transformers for frequency agile communication and radars providing next generation Electronic Support, Electronic Protection, and Electronic Attack aspects of Electronic Warfare; improved sensors and components for assured Position, Navigation, and Timing (PNT); subsystems for next generation munitions; novel materials and fabrication methods for IR sensor improvement and protection; and on-chip technology helping to guard against battlefield loss scenarios.

  • MEMS Basic Research
    Includes device modeling, design, and fabrication.
  • MEMS Applied Research
    Bridges the gap from device modeling, design and fabrication to also incorporate device optimization and prototyping.
Principal Investigator(s): 
Christopher Morris
Jeff Carroll