Document Number Title Inventors Publish/ Grant Date
US7185541 MEMS magnetic device and method Edelstein, Alan S. 03/06/2007
US7270008 Inertial testing method and apparatus for wafer-scale micromachined devices Deanna, Russell G. 09/18/2007
US7304732 Microelectromechanical resonant photoacoustic cell Polcawich, Ronald G.; Pellegrino, Paul 12/04/2007
US7420318 Lateral piezoelectric microelectromechanical system (MEMS) actuation and sensing device Pulskamp, Jeffrey S. 09/02/2008
US7486002 Lateral piezoelectric driven highly tunable micro-electromechanical system (MEMS) inductor Pulskamp, Jeffrey S. 02/03/2009
US7518474 Piezoelectric in-line RF MEMS switch and method of fabrication Pulskamp, Jeffrey S.; Polcawich, Ronald G.; Judy, Daniel C. 04/14/2009
US7529154 Hybrid thin film heterostructure modular vibration control apparatus and methods for fabrication thereof Cole, Melanie W.; Nothwang, William 05/05/2009
US7532093 RF MEMS series switch using piezoelectric actuation and method of fabrication Pulskamp, Jeffrey S.; Polcawich, Ronald G.; Judy, Daniel 05/12/2009
US7576837 Micro-mirror optical tracking and ranging system Liu, Jony Jiang; Von Der, Lippe Christian 08/18/2009
US7642692 PZT MEMS resonant Lorentz force magnetometer Pulskamp, Jeffrey S. 01/05/2010
US7655996 MEMS structure support and release mechanism Edelstein, Alan S. 02/02/2010
US7876026 Large force and displacement piezoelectric MEMS lateral actuation Pulskamp, Jeffrey Spencer; Polcawich, Ronald G. 01/25/2011
US7915891 MEMS device with tandem flux concentrators and method of modulating flux Edelstein, Alan S. 03/29/2011
US7923999 MEMS device with supplemental flux concentrator Edelstein, Alan S. 04/12/2011
US7944121 Negative vertical deflection piezoelectric MEMS actuators and method of fabrication Pulskamp, Jeffrey Spencer; Polcawich, Ronald G. 05/17/2011
US8278919 MEMS oscillating magnetic sensor and method of making Fischer, Gregory Alexander; Fine, Jonathan Elliott; Edelstein, Alan Shane 10/02/2012
US8318595 Self-assembled electrical contacts Morris, Christopher J.; Dubey, Mandan 11/27/2012
US8461948 Electronic ohmic shunt RF MEMS switch and method of manufacture Pulskamp, Jeffrey S.; Judy, Daniel C.; Polcawich, Ronald G. 06/11/2013
US8541926 Nano/micro electro-mechanical relay Pulskamp, Jeffrey S.; Judy, Daniel C. 09/24/2013
US8611565 Microscale implementation of a bio-inspired acoustic localization device Currano, Luke J.; Gee, Danny 12/17/2013
US8966993 Three dimensional piezoelectric MEMS Pulskamp, Jeffrey S.; Polcawich, Ronald G. 03/03/2015
US9083208 Ball bearing supported electromagnetic microgenerator Beyaz, Mustafa I.; Ghodssi, Reza; Waits, Christopher M. 07/14/2015
US9583250 MEMS Tunable Inductor Meyer, Christopher D.; Lazarus, Nathan S. 02/28/2017